金属/シリコン酸化物界面におけるアモルファス形成†
REFERENCES
- T. Nagase, R. Yamashita, A. Yabuuchi, J.-G. Lee, AIP Advances, 5, 117145 1-7 (2015), "An amorphous phase formation at palladium / silicon oxide (Pd/SiOx) interface through electron irradiation - electronic excitation process", http://dx.doi.org/10.1063/1.4936629