金属/SiOx 界面におけるシリサイド形成の履歴(No.3)

金属/シリコン酸化物界面におけるシリサイド形成†

REFERENCES

J. -G. Lee, T. Nagase, H. Yasuda, H. Mori, Journal of Applied Physics, 117, 194307 1-8 (2015)., "Synthesis of metal silicide at metal/silicon oxide interface by electronic excitation", http://dx.doi.org/10.1063/1.4921429
T. Nagase, R. Yamashita, J.-G. Lee, Microscopy, 64, i26 (2015)., "In situ observation of Pt silicide formation at Pt/SiOx interface under electron irradiation", http://dx.doi.org/10.1093/jmicro/dfv102