高圧電子顕微鏡法
をテンプレートにして作成
開始行:
*Features of the ultra-high voltage electron microscope (...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/UHVEM.jp...
''Figure 1''
''Ultra-High Voltage Electron Microscope - Hitachi H-3000...
~
The 3 MV ultra-high voltage electron microscope (Hitachi ...
+ Remarkable increases in the maximum observable thicknes...
+ Various types of in-situ observations made possible by ...
+ Lattice defect introduction and/or non-equilibrium phas...
~
Main specifications
-High voltage generator
--Symmetrical Cockcroft–Walton circuit: 35-stage
--Electricity consumption in high voltage tank: under 1 kW
--Acceleration voltage:
---Normal: 3.0 MV (3000 kV)
---Medium: 0.5, 1.0, 1.5, 2.0, 2.5 MV
---Maximum: 3.5 MV
---Stability of high voltage: less than 2.0×10-6/min
-Electron gun and acceleration tube
--Cathode: LaB6 single crystal (thermal type)
--Beam current: maximum 20 mA
--Acceleration tube: 22 kV/step × 138 steps (3 MV)
--Insulating gas: SF6 (4 atom)
-Irradiation lens system
--Ion trapping system: electron beam shift by polarizatio...
--Lens constitution: double-condenser lens
--Beam angle: less than 10-3
-Imaging lens system
--Lens configuration: six-step lens system (no image rota...
--Magnification: 200 to 1,000,000 (30-step switching)
--Camera length at electron diffraction: maximum 14 m (si...
--Resolution: less than 10 nm
-Objective lens
--Magnetomotive force: maximum 23 A/V1/2 (3 MV)
--Focusing length: less than 11 mm
--Spherical aberration coefficient: less than 10 mm
--Chromatic aberration coefficient: less than 10 nm
--Defocused point: minimum 5 nm
-Specimen space
--Holder: Top-entry type and side-entry type
--Orientation angle of top-entry type: ±30 degrees (doubl...
--Orientation angle of side-entry type: ±45 degrees (doub...
--Specimen motion: ±1 mm (mechanical system), ±1.5 mm (el...
--Vacuum: 5×10-6 Pa (oil-free vacuum system)
-Camera room and operation room
--Photo system: imaging plate (32 sheets × 2), film (50 s...
--Fluorescent substance: P22, YAG
--Fluorescent screen: maximum 60 × 80 mm
-TV camera
--High resolution type: 1125-line HARP camera
--High sensitivity type: slow-scan CCD camera with cooling
--Video recording: NTSC mode HARP camera
-Remote control system
--Operation system: Console panel for remote operation
--Controlling system: main control workstation system and...
--Monitoring system: X-ray, oxygen deficiency, beam posit...
~
~
----
*Cross section for atomic displacement by fast electron, ...
''Table 1''~
''Threshold energy (Ed), threshold acceleration voltage (...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/02-02-Cr...
~
''012 Mg (Atomic number 12, Atomic mass number 24.31, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-012-M...
''013 Al (Atomic number 13, Atomic mass number 26.98, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-013-A...
''014 Si (Atomic number 14, Atomic mass number 28.09, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-014-S...
''022 Ti (Atomic number 22, Atomic mass number 47.88, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-022-T...
''023 V (Atomic number 23, Atomic mass number 50.94, Ed 2...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-023-V...
~
''024 Cr (Atomic number 24, Atomic mass number 51.9961, E...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-024-C...
~
''026 Fe (Atomic number 26, Atomic mass number 58.93, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-026-F...
~
''027 Co (Atomic number 27, Atomic mass number 58.93, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-027-C...
~
''028 Ni (Atomic number 28, Atomic mass number 58.69, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-028-N...
~
''029 Cu (Atomic number 29, Atomic mass number 63.55, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-029-C...
~
''040 Zr (Atomic number 40, Atomic mass number 91.22, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-040-Z...
~
''041 Nb (Atomic number 41, Atomic mass number 92.21, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-041-N...
~
''042 Mo (Atomic number 42, Atomic mass number 95.94, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-042-M...
~
''046 Pd (Atomic number 46, Atomic mass number 106.4, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-046-P...
~
''047 Ag (Atomic number 47, Atomic mass number 107.9, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-047-A...
~
''050 Sn (Atomic number 50, Atomic mass number 118.7, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-050-S...
~
''051 Sb (Atomic number 51, Atomic mass number 121.75, Ed...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-051-S...
~
''060 Nd (Atomic number 60, Atomic mass number 144.2, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-060-N...
~
''072 Hf (Atomic number 72, Atomic mass number 178.5, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-072-H...
~
''073 Ta (Atomic number 73, Atomic mass number 180.9, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-073-T...
~
''074 W (Atomic number 74, Atomic mass number 183.84, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-074-W...
~
''078 Pt (Atomic number 78, Atomic mass number 195.1, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-078-P...
~
''079 Au (Atomic number 79, Atomic mass number 197, Ed 33...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-079-A...
''Figure 1''~
''Cross section (s) for atomic displacement of pure eleme...
REFERENCE~
[1] T. Nagase, Advanced materials design by irradiation o...
[2] T. Nagase, T. Sanda, A. Nino, W. Qin, H. Yasuda, H. M...
[3] K. Urban: Phys. Stat. Sol. A 56, 157–168 (1979).~
[4] K. Urban: Electron Microsc. 4, 188–195 (1980).~
[5] H. Fujita: Hiheikou-zairyo no Riron to Gijyutsu, Semi...
[6] W.A. Mckinley, H. Feshbach: Phys Rev., 74, 1759-1763 ...
[7] F. Seitz, J.S. Koehler: in: Seitz, F., Tumbull, D. (E...
[8] J.W. Corbett: in Electron Radiation Damage in Semicon...
[9] O.S. Oen: Nucl. Instrum. Methods Phys. Res. Sect. B 3...
~
~
----
*Review papers for High Voltage Electron Microscopy (Mate...
REFERENCES~
[1] H. Fujita: J. of Electron Micro. Tech. 3, 243–304 (19...
[2] H. Fujita.: J. of Electron Micro. Tech. 12, 201–218 (...
[3] A. Seeger: J. of Electron Micro. 48, 301-305 (1999).~
[4] H. Fujita: Proc. Jpn. Acad., Ser. B, Vol. 81, 141-155...
[5] H. Mori: J. of Electron Micro., 60, S189-S197 (2001).~
[6] H. Yasuda: Kenbikyo, 46, 160-164 (2011). (in Japanese)~
~
終了行:
*Features of the ultra-high voltage electron microscope (...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/UHVEM.jp...
''Figure 1''
''Ultra-High Voltage Electron Microscope - Hitachi H-3000...
~
The 3 MV ultra-high voltage electron microscope (Hitachi ...
+ Remarkable increases in the maximum observable thicknes...
+ Various types of in-situ observations made possible by ...
+ Lattice defect introduction and/or non-equilibrium phas...
~
Main specifications
-High voltage generator
--Symmetrical Cockcroft–Walton circuit: 35-stage
--Electricity consumption in high voltage tank: under 1 kW
--Acceleration voltage:
---Normal: 3.0 MV (3000 kV)
---Medium: 0.5, 1.0, 1.5, 2.0, 2.5 MV
---Maximum: 3.5 MV
---Stability of high voltage: less than 2.0×10-6/min
-Electron gun and acceleration tube
--Cathode: LaB6 single crystal (thermal type)
--Beam current: maximum 20 mA
--Acceleration tube: 22 kV/step × 138 steps (3 MV)
--Insulating gas: SF6 (4 atom)
-Irradiation lens system
--Ion trapping system: electron beam shift by polarizatio...
--Lens constitution: double-condenser lens
--Beam angle: less than 10-3
-Imaging lens system
--Lens configuration: six-step lens system (no image rota...
--Magnification: 200 to 1,000,000 (30-step switching)
--Camera length at electron diffraction: maximum 14 m (si...
--Resolution: less than 10 nm
-Objective lens
--Magnetomotive force: maximum 23 A/V1/2 (3 MV)
--Focusing length: less than 11 mm
--Spherical aberration coefficient: less than 10 mm
--Chromatic aberration coefficient: less than 10 nm
--Defocused point: minimum 5 nm
-Specimen space
--Holder: Top-entry type and side-entry type
--Orientation angle of top-entry type: ±30 degrees (doubl...
--Orientation angle of side-entry type: ±45 degrees (doub...
--Specimen motion: ±1 mm (mechanical system), ±1.5 mm (el...
--Vacuum: 5×10-6 Pa (oil-free vacuum system)
-Camera room and operation room
--Photo system: imaging plate (32 sheets × 2), film (50 s...
--Fluorescent substance: P22, YAG
--Fluorescent screen: maximum 60 × 80 mm
-TV camera
--High resolution type: 1125-line HARP camera
--High sensitivity type: slow-scan CCD camera with cooling
--Video recording: NTSC mode HARP camera
-Remote control system
--Operation system: Console panel for remote operation
--Controlling system: main control workstation system and...
--Monitoring system: X-ray, oxygen deficiency, beam posit...
~
~
----
*Cross section for atomic displacement by fast electron, ...
''Table 1''~
''Threshold energy (Ed), threshold acceleration voltage (...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/02-02-Cr...
~
''012 Mg (Atomic number 12, Atomic mass number 24.31, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-012-M...
''013 Al (Atomic number 13, Atomic mass number 26.98, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-013-A...
''014 Si (Atomic number 14, Atomic mass number 28.09, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-014-S...
''022 Ti (Atomic number 22, Atomic mass number 47.88, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-022-T...
''023 V (Atomic number 23, Atomic mass number 50.94, Ed 2...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-023-V...
~
''024 Cr (Atomic number 24, Atomic mass number 51.9961, E...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-024-C...
~
''026 Fe (Atomic number 26, Atomic mass number 58.93, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-026-F...
~
''027 Co (Atomic number 27, Atomic mass number 58.93, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-027-C...
~
''028 Ni (Atomic number 28, Atomic mass number 58.69, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-028-N...
~
''029 Cu (Atomic number 29, Atomic mass number 63.55, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-029-C...
~
''040 Zr (Atomic number 40, Atomic mass number 91.22, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-040-Z...
~
''041 Nb (Atomic number 41, Atomic mass number 92.21, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-041-N...
~
''042 Mo (Atomic number 42, Atomic mass number 95.94, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-042-M...
~
''046 Pd (Atomic number 46, Atomic mass number 106.4, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-046-P...
~
''047 Ag (Atomic number 47, Atomic mass number 107.9, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-047-A...
~
''050 Sn (Atomic number 50, Atomic mass number 118.7, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-050-S...
~
''051 Sb (Atomic number 51, Atomic mass number 121.75, Ed...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-051-S...
~
''060 Nd (Atomic number 60, Atomic mass number 144.2, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-060-N...
~
''072 Hf (Atomic number 72, Atomic mass number 178.5, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-072-H...
~
''073 Ta (Atomic number 73, Atomic mass number 180.9, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-073-T...
~
''074 W (Atomic number 74, Atomic mass number 183.84, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-074-W...
~
''078 Pt (Atomic number 78, Atomic mass number 195.1, Ed ...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-078-P...
~
''079 Au (Atomic number 79, Atomic mass number 197, Ed 33...
#ref(https://t-nagase.sakura.ne.jp/pict/20151005/CS-079-A...
''Figure 1''~
''Cross section (s) for atomic displacement of pure eleme...
REFERENCE~
[1] T. Nagase, Advanced materials design by irradiation o...
[2] T. Nagase, T. Sanda, A. Nino, W. Qin, H. Yasuda, H. M...
[3] K. Urban: Phys. Stat. Sol. A 56, 157–168 (1979).~
[4] K. Urban: Electron Microsc. 4, 188–195 (1980).~
[5] H. Fujita: Hiheikou-zairyo no Riron to Gijyutsu, Semi...
[6] W.A. Mckinley, H. Feshbach: Phys Rev., 74, 1759-1763 ...
[7] F. Seitz, J.S. Koehler: in: Seitz, F., Tumbull, D. (E...
[8] J.W. Corbett: in Electron Radiation Damage in Semicon...
[9] O.S. Oen: Nucl. Instrum. Methods Phys. Res. Sect. B 3...
~
~
----
*Review papers for High Voltage Electron Microscopy (Mate...
REFERENCES~
[1] H. Fujita: J. of Electron Micro. Tech. 3, 243–304 (19...
[2] H. Fujita.: J. of Electron Micro. Tech. 12, 201–218 (...
[3] A. Seeger: J. of Electron Micro. 48, 301-305 (1999).~
[4] H. Fujita: Proc. Jpn. Acad., Ser. B, Vol. 81, 141-155...
[5] H. Mori: J. of Electron Micro., 60, S189-S197 (2001).~
[6] H. Yasuda: Kenbikyo, 46, 160-164 (2011). (in Japanese)~
~
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