Synthesis of silicides at metal/SiOx interface の履歴(No.2)



Material modification by electron irradiation - electronic excitation

Synthesis of silicides at metal/SiOx interface

REFERENCES
[1] J. -G. Lee, T. Nagase, H. Yasuda, H. Mori, Journal of Applied Physics, 117, 194307 1-8 (2015)., "Synthesis of metal silicide at metal/silicon oxide interface by electronic excitation", http://dx.doi.org/10.1063/1.4921429


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